Electronics & Applications Seminar - All-silicon module production

Monday 19 Jan 2026, 13:00 → 14:00 Europe/Berlin

Kreuzbergweg 24/2.010 (FTD) - Besprechungsraum 2. OG (FTD)

Marco Vogt (uni-bonn)

Zoom Link: https://uni-bonn.zoom-x.de/j/7850372106?pwd=SJaPF6hqeYwjqt1sIVubLWQq4q2NBp.1&omn=63160090408

 

13:00 → 13:05 General

13:05 → 13:45 Presentation

20 min + 20 min discussion

13:05 All-Silicon module production

The FTDs cleanroom is slowly ramping up its service. The 350m² of cleanroom include ISO standards from 7 to 5. While ISO 7 is mostly occupied by ATLAS production, currently, ISO 6 rooms range from wafer probe stations over interconnect technologies to gas detector assembly. In the yellow light area of ISO 6 and ISO 5 it is possible to produce gems with dry resists and post procession of wafers with different photo resists. This talk will discuss the development and investigation of a process for RDL layers on top of monolithic CMOS wafers. Since the process is ongoing work, it will include current issues and proposals for overcoming them as well as preliminary measurements on some test structures.

Speaker: Andreas Ulm (Universität Bonn - SiLab)

13:45 → 14:00 Feedback, AOB